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Wafer Quote |
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Super Thin Wafers
Diameters: 100mm to 200mm
Thickness as low as 60um
Application: Gyro-sensors, MEMS, etc. |
 Contact us for additional information
and/or a quotation. |
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Data for 4 inch DSP Thin Water |
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| Wafer # |
Class # |
Cen. THK
UMTR |
TTV
UMTR |
PT5 #4
UMTR |
PT5 #2
UMTR |
PT5 #5
UMTR |
PT5 #3
UMTR |
STIR
UMTR |
| 1 |
1-Accept |
102.52 |
0.68 |
102.91 |
102.83 |
102.89 |
102.69 |
0.42 |
| 2 |
1-Accept |
101.06 |
0.93 |
101.35 |
101.23 |
101.39 |
101.19 |
0.56 |
| 3 |
1-Accept |
103.42 |
0.69 |
103.83 |
103.90 |
103.84 |
103.71 |
0.42 |
| 4 |
1-Accept |
102.65 |
0.71 |
103.20 |
103.24 |
103.11 |
103.04 |
0.42 |
| 5 |
1-Accept |
103.24 |
0.59 |
103.63 |
103.61 |
103.72 |
103.58 |
0.36 |
| 6 |
1-Accept |
102.66 |
0.65 |
103.05 |
103.07 |
103.10 |
102.93 |
0.36 |
| 7 |
1-Accept |
103.91 |
0.62 |
104.34 |
104.44 |
104.47 |
104.28 |
0.37 |
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System ID: Undefined
Plant Order: Plant Id
Inspector: Inspector Id
Wafer#: 1
Wafer Diameter: 100MM
FQA: 94.00MM
Prim Fid Radius: 46.30 MM
Sec Fid Radium: 48.50 MM
Class: 1-Accept
Graph Content Flatness
Rotation Angle: 30.0 DEG
Scale: 10.00 UMTR
FLAT Ref Plane Best Fit
FPD-bf: -0.34 UMTR
TIR-bf: 0.64UMTR
TTV: 0.66 UMTR
Ave. THK: 99.21 UMTR
Min. THK: 98.85 UMTR
Max. THK: 99.51 UMTR
Cen. THK: 98.91 UMTR
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Action: Printing graph...
Entry: |
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System ID: Undefined
Plant Order: Plant Id
Inspector: Inspector Id
Wafer#: 1
Wafer Diameter: 100MM
FQA: 94.00MM
Prim Fid Radius: 46.30 MM
Sec Fid Radium: 48.50 MM
Class: 1-Accept
Graph Content Flatness
Scale: 10.00 UMTR
FLAT Ref Plane Best Fit
FPD-bf: -0.33 UMTR
TIR-bf: 0.54UMTR
TTV: 0.59 UMTR
Ave. THK: 103.48 UMTR
Min. THK: 103.15 UMTR
Max. THK: 103.74 UMTR
Cen. THK: 103.23 UMTR
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Action: Printing graph...
Entry: |
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Data for 4 inch DSP Thin Water |
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System ID: Undefined
Plant Order: Plant Id
Inspector: Inspector Id
Wafer#: 1
Wafer Diameter: 100MM
FQA: 94.00MM
Prim Fid Radius: 46.30 MM
Sec Fid Radium: 48.50 MM
Class: 1-Accept
Graph Content Flatness
Rotation Angle: 30.0 DEG
Scale: 5.00 UMTR
FLAT Ref Plane Best Fit
FPD-bf: -0.33 UMTR
TIR-bf: 0.54UMTR
TTV: 0.59 UMTR
Ave. THK: 103.48 UMTR
Min. THK: 103.15 UMTR
Max. THK: 103.74 UMTR
Cen. THK: 103.23 UMTR
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Action: Printing graph...
Entry: |
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System ID: Undefined
Plant Order: Plant Id
Inspector: Inspector Id
Wafer#: 1
Wafer Diameter: 100MM
FQA: 94.00MM
Prim Fid Radius: 46.30 MM
Sec Fid Radium: 48.50 MM
Class: 1-Accept
Graph Content STIR (Numerical)
SFPD: -0.28 UMTR
SFPD%: 100.00%
STIR: 0.36 UMTR
STIR%: 100.00%
Width (X): 10.00MM
Height (Y): 10.00MM
Site Ref Plane Front Ref, Front Foc Partial Sites Inactive
X-Offset: 0.00MM
Y-Offset: 0.00MM
Row-Offsets: Inactive
STIR% Limits: 0.00/0.00
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Action: Printing graph...
Entry: |
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The above map data of the dimple is a vacuum chuck mark, not an actual dimple.
This is just occurred during The measurement of data from the ADE measuring equipment. |
| Wafer # |
Class # |
Cen. THK
UMTR |
TTV
UMTR |
PT5 #4
UMTR |
PT5 #2
UMTR |
PT5 #5
UMTR |
PT5 #3
UMTR |
STIR
UMTR |
| 1 |
1-Accept |
103.23 |
0.59 |
103.61 |
103.55 |
103.68 |
103.54 |
0.36 |
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