• Belt drive wafer sorting system
• Non-contact measurement of resistivity, thickness and PN
• Standard cassette number: Loader: 4, Un-loader: 6
• Any number of cassette is available
• Wafer size: 3 inch to 8 inch (Choose 3 sizes) (or 8 inch and 12 inch)
• Meas. range:
  (Resistivity)
  Low:   0.001 Ohm-cm to 0.05 Ohm-cm
  Middle:  0.05 Ohm-cm to 0.5 Ohm-cm
  High:  0.5 Ohm-cm to 60 Ohm-cm
  (Thickness)
  approx. 150 um to 800 um

Silicon Wafers

• Robotic drive wafer sorting system
• Non-contact measurement of resistivity, thickness and PN
• High through put by wafer rotary system
• GO/NG sorting mode and Grouping mode are available
• Standard cassette number: Loader: 4, Un-loader: 6
• Any number of cassette is available
• Wafer size: 4 inch to 8 inch (or 8 inch and 12 inch)
• Meas. range:
  (Resistivity)
  Low: 0.001 Ohm-cm to 0.05 Ohm-cm
  Middle: 0.05 Ohm-cm to 0.5 Ohm-cm
  High: 0.5 Ohm-cm to 60 Ohm-cm
  (Thickness)
  approx. 150 um to 800 um

Silicon Wafers

• Non-contact resistivity (or thickness ) and PN check 
• High speed NG judgement placing system
• Possible to measure wafers by choosing randomly
• Wafer size: 6 inch and 8 inch
• Meas. range:
  (Resistivity)
  0.001 Ohm-cm to 60 Ohm-cm
  (Thickness)
  approx. 150 um to 800 um

Silicon Wafers