| Non-contact Method |
Features / Specification |
Substrates |
PN-50 alpha
|
- Non-contact and compact PN type checker
- Principle: Photovoltaic effect
- No damage and no stain by Non-contact method
- Possible to check even oxidized film on water surface
- Instantly P/N discrimination
- Checking range:
(Resistivity)
0.1 Ohm-cm to 1000 Ohm-cm
(Depends on surface conditions)
(Thickness)
Up to approx. 3mm
- Available to build into an automatic wafer loading / unloading system (PN-80 alpha)
|
Silicon wafers
- Lapped
- Etched
- Polished
- Mirror
- Bulk
|
EC-80
|
- Non-contact eddy current tester with easy manual operation
- Compact design
- Easy to set up measurement condition by JOG dial
- Choose one type of sensor from 4 sensors by measurement range
- Wafers size: 2 inch to 8 inch
- Measurement range:
(Resistivity)
Low: 0.001 Ohm-cm to 0.05 Ohm-cm
Middle: 0.05 Ohm-cm to 0.5 Ohm-cm
High: 0.5 Ohm-cm to 60 Ohm-cm
S/High: 5 Ohm-cm to 100 Ohm-cm
(Sheet resistance)
Low: 0.01 Ohm/sq to 0.05 Ohm/sq
Middle: 0.5 Ohm/sq to 10 Ohm/sq
High: 10 Ohm/sq to 1000 Ohm/sq
S/High: 50 Ohm/sq to 2000 Ohm/sq
|
Silicon wafers
Thin Films
- Metal
- ITO
Chemical compound
- GaAs Epi layers and so on
|
NC-10
|
- Easy operation and data processing by PC
- Replacement sensors of Middle and High by measurement range
- Temperature correction function (for silicon wafers)
- Wafers size: 3 inch to 8 inch (There is a 2 inch and 12 inch version)
- Measurement range:
(Resistivity)
Low: 0.001 Ohm-cm to 0.05 Ohm-cm
Middle: 0.05 Ohm-cm to 0.5 Ohm-cm
High: 0.5 Ohm-cm to 60 Ohm-cm
*Available up to approx. 100 Ohm-cm
(Sheet resistance)
approx. Up to 3000 Ohm/sq
|
RC-1PN
 |
- Simple measurement unit for resistivity checking and P&N type
- Resistivity: Eddy current (Non-contact) method
- Non-contact and compact PN type checker
- Principle: Photovoltaic effect
- No damage and no stain by Non-contact method
- Possible to check even oxidized film on wafer surface
- Wafer size: 2 inch and 12 inch
- Well suited for silicon wafers of solar cells and/or reclaimed wafers
- Resistivity sorting (For example): 0.5 to 1 to 10 Ohm-cm (Other sorting ranges are available)
- Easy operation by putting samples on the measurement stage
|
Silicon wafers
- Lapped
- Etched
- Polished
- Mirror
- Bulk |
PN TESTER  |
- Non-contact method
Resistivity range 20mΩcm to 3000Ωcm
Measurement time - 0.5s
- Pen will light up for either P or N type
|
Silicon wafers
- Lapped
- Etched
- Polished
- Mirror
- Bulk
Silicon Ingots
Silicon Remelt
Silicon Pot Scrap |
Resistivity+Thickness
(Manual) |
Features / Specifications |
Substrates |
RC1S / TH
 |
- Simple measurement unit for resistivity checking and thickness measurement
- Resistivity: Eddy current (Non-contact) method
- Thickness: Gauge method
- Well suited for silicon wafers of solar cells and/or reclaimed wafers
- Resistivity sorting (For example): 0.5 to 1 to 10 Ohm-cm (Other sorting ranges are available)
- Easy operation by putting samples on the measurement stage
- Built in PN type checkers (Resistivity + PN) is available (RC-2PN)
|
Silicon wafers
- Lapped
- Etched
- Polished
- Mirror
- Bulk |
| Manual Type |
Features / Specifications |
Substrates |
TS-7D
 |
- Silicon Wafers and Scrap Resistivity Gauge
- Contact method
|
Silicon Wafers
Silicon Remelt
Silicon Pot Scrap |
PN-12 alpha
|
- Contact PN type checker for low to high wide range resistivity
- Principle: Thermo-electromotive force method (Seebek effect)
- Electrode: Hot probe and Cold probe
- Possible to check most figure of sample (Silicon wafer, Bulk, Ingot and so on) (Oxidized film on wafer surface: Not available)
- Equipped with Thermometer and Analogue meter
- Checking range:
(Resistivity) 1m Ohm-cm to 20 K Ohm-cm
- Available to build into an automatic wafer loading / unloading system (PN-12 beta)
|
Silicon Wafers
- Lapped
- Etched
- Polished
- Mirror
- Bulk
Silicon Ingots
Silicon Remelt
Silicon Pot Scrap |
RESISTIVITY TESTER
 |
- 4-point contact for Resistivity
- Computerized Accuracy with Smart Probe Technology
- Selectable current sources: 2mils or 200 micro amps.
- Reports Low Resistance condition.
- Four Point Probe Head by Cascade.
- Portable! Ultra Small!!
- Ergonomic Probe handles (one for Type and one for Resistance)
- LCD Displays actual resistance >0.10 ohm cm.
- LCD Displays Type N/P with Distinct Sound reporting.
- Auto mode checks Resistance and Type in 1 second.
|
Silicon Wafers
- Lapped
- Etched
- Polished
- Mirror
- Bulk
Silicon Ingots
Silicon Remelt
Silicon Pot Scrap |