• Sheet resistance multi-point measurement system for thin metal layers
• Calibration function
• Layer thickness direct read out with software
• Min. 5mm position from edge can be measured
• Wafer size: 3 inch to 8 inch
• Meas. range:
  (Sheet resistance)
  5m Ohm/sq to 1 Ohm/sq
  Up to 20 Ohm/sq (Option)
• Mapping software: Up to 121 points (Option)
• Compatible fully (handling) automatic carrier system (Option)

Metal layers
- Ai, Cu, Ti, TiN
and so on

• Sheet resistance multi-point measurement system for chemical compound GaAs Epic layers, Gap, GaN etc
• Calibration function
• Min. 7mm position from edge can be measured
• Wafer size: 2 inch to 6 inch (8 inch: Option)
• Meas. range:
  (Sheet resistance)
  1 Ohm/sq to 3000 Ohm/sq
  0.001 Ohm/sq to 1 Ohm/sq (Option)
• Mapping software: Up to 217 points (Option)
• Compatible fully (handling) automatic carrier system (Option)

Chemical compound
- GaAs
- Gap
- GaN
and so on

• Non-destroy eddy current method sheet resistance meas. system
• Inclined stage: Designed with working property and space-saving
• 4 point probe system is also available
  (cf. RT-80 / RG-1200S)
• Caliblation function
• Well suited model to ITO or Metal layers measurement which is required by Non-destroy
• Glass (Substrate) size: Up to 1500mm x 1800mm
• Meas. range:
  (Sheet resistance)
  <For Metal layers>
  approx. 5m Ohm/sq to 1 Ohm/sq
  <For ITO layers>
  approx. 1 Ohm/sq to 200 Ohm/sq
  (Other ranges: also available)
• Display Sheet resistance and Film thickness
• Mapping software (Option)

FPD substrates
- ITO layers
- Metal layers
and so on

• High-precision measurement for material layers or ITO on glass substrate with non-contact eddy current sensors
• Multi-points measurement with 3 sensors
• Glass (Substrate) size: Up to 500 mmx 500 mm
• Meas. range: (Sheet resistance)
  <For Metal layers> approx. 3 m Ohm/sq to 1 Ohm/sq
  <For ITO layers> approx. 1 Ohm/sq to 200 Ohm/sq
  (Other ranges: also available)
• Displays Sheet resistance and Film thickness
• Mapping software (Option)

FPD substrates
- ITO layers
- Metal layers
and so on