• Non-contact eddy current tester with easy manual operation
• Compact design
• Easy to set up measurement condition by JOG dial
• Choose one type of sensor from 4 sensors by meas. range
• Wafers size: 2 inch to 8 inch
• Meas. range:
  (Resistivity)
  Low: 0.001 Ohm-cm to 0.05 Ohm-cm
  Middle: 0.05 Ohm-cm to 0.5 Ohm-cm
  High: 0.5 Ohm-cm to 60 Ohm-cm
  S/High: 5 Ohm-cm to 100 Ohm-cm
  (Sheet resistance)
  Low: 0.01 Ohm/sq to 0.5 Ohm/sq
  Middle: 0.5 Ohm/sq to 10 Ohm/sq
  High: 10 Ohm/sq to 1000 Ohm/sq
  S/High: 50 Ohm/sq to 2000 Ohm/sq

Silicon wafers

Thin Films
- Metal
- ITO

Chemical compound
- GaAs Epi layers and so on

• Easy operation and data processing by PC
• Replacement sensors of Middle and High by meas. range
• Temperature correction function (for silicon wafers)
• Wafers size: 3 inch to 8 inch (There is 2 inch and/or 12 inch version)
• Meas. range:
  (Resistivity)
  Low: 0.001 Ohm-cm to 0.05 Ohm-cm
  Middle: 0.05 Ohm-cm to 0.5 Ohm-cm
  High: 0.5 Ohm-cm to 60 Ohm-cm
  *Available up to approx. 100 Ohm-cm
  (Sheet resistance)
  approx. Up to 3000 Ohm/sq

• Simple measurement unit for resistivity checking and P & N type
• Resistivity: Eddy current (Non-contact) method
• Non-contact and compact PN type checker
• Principle: Photovoltaic effect
• No damage and no stain by Non-contact method
• Possible to check even oxidized film on wafer surface
• Wafer size: 2 inch and 12 inch
• Well suited to silicon wafer of solar cell and/or reclaimed wafers
• Resistivity sorting (For example): 0.5 to 1 to 10 Ohm-cm (Other sorting range is available)
• Easy operation by putting samples on the measurement stage

• Semi-automatic measurement system of Non-contact resistivity, thickness and PN check (Thickness, PN check: option)
• Temperature measurement and Calibration function
• Wafer size:
  <NC-80> 6 inch adn 8 inch
  <NC-120> 8 inch and 12 inch
• Meas. range:
  (Resistivity)
  Low: 0.001 Ohm-cm to 0.05 Ohm-cm
  Middle: 0.05 Ohm-cm to 0.5 Ohm-cm
  High: 0.5 Ohm-cm to 60 Ohm-cm
  *Available up to approx. 100 Ohm-cm
• Multi-point measurement up to 9 points
• 17 points measurement (Option)
• Mapping software (Option)

• Fully automatic measurement system of NC-80 with wafer loading robot
• Temperature measurement and Calibration function
• Wafer size:
  <NC-80> 6 inch adn 8 inch
  <NC-120> 8 inch and 12 inch
• Meas. range:
  (Resistivity)
  Low: 0.001 Ohm-cm to 0.05 Ohm-cm
  Middle: 0.05 Ohm-cm to 0.5 Ohm-cm
  High: 0.5 Ohm-cm to 60 Ohm-cm
  *Available up to approx. 100 Ohm-cm
• Multi-point measurement up to 9 points
• 17 points measurement (Option)
• Mapping software (Option)