• Silicon Wafer and Scrap Resistivity Gauge
• Contact method

Silicon wafers
Silicon Remelt
Silicon Pot Scrap

• Thickness input with easy JOG dial operation (RT-70 Tester)
• Self-test function
• Auto change-over measurement range function
• 7 types of measurement modes
• Wafer size: 2 inch to 8 inch
  (12 inch version is available: RG-70)
• Meas. range:
  (Resistivity)
  1m Ohm-cm to 999.9k Ohm-cm
  (Sheet resistance)
  10m Ohm/sq to 9999k Ohm/sq
• Stage: Electric probe up-down stroke
• Equipped with RS-232C interface, Printer interface

Silicon wafers

Thin Films
- Metal
- Diffused
- ITO
and so on

• Manual probe up-down stroke stage
• Specifications: Same as RT-70 / RG-7
• Wafer size: 2 inch to 8 inch
• Meas. range:
  (Resistivity)
  1m Ohm-cm to 999.9k Ohm-cm
  (Sheet resistance)
  10m Ohm/sq to 9999k Ohm/sq

• Recipe settings, Measurements and Data processing with easy PC operation
• Test patterns: User programmable (Shape: Circle / Square)
• Self-test function, Calibration function and Wide meas. range
• Wafer size: 3 inch to 8 inch
  (12 inch version is available: RG-120)
• Meas. range:
  (Resistivity)
  50u Ohm-cm to 40M Ohm-cm
  (Sheet resistance)
  0.5m Ohm/sq to 400M Ohm/sq
• Thickness, Edge and Temperature correction function (for silicon wafers)
• Display Sheet resistance and Film thickness
• Mapping software: Up to 1221 points (Option)

Silicon wafers

Thin Films
- Metal
- Diffused
- ITO
- Ion-implanted
- Epitaxial
and so on

• Designed to measure thin layer on silicon wafer
• Thin layer 3nm is available
• High accuracy tester Model RT-3000 equipped
• Fully automatic cassette to cassette handling (GEM)
• Rotary mechanism which can equip with 4 kinds of probe head
• No need to exchange probe head for every meas. sample
• Edge 1mm measurement is available by Dual meas. mode
• Test patterns: User programmable
• Wafer size: 12 inch (Option: 8 inch)
• Meas. range:
  (Sheet resistance)
  1.0m Ohm/sq to 100M Ohm/sq
• Internal resistance accuracy:
  +/-0.1% (1 Ohm to 1M Ohm)
• Repeatability:
  CV = % of sigma less than 0.2%
• 49 points mapping / 60 sec. (300mm wafer)
• Tact: 120 sec. / wafer (inc. load - unload)
• FOUP compatible
  (Option: SMIF / AM 3000)

Thin Films
- Metal
- Diffused
- Ion-implanted
- Epitaxial
and so on

Silicon wafers

• Fully automatic model of RT-80 / RG-80 equipped with (Cassette to cassette) robot
• Thickness measurement and PN check (Option)
• Self-test function, Calibration function and Wide meas. range
• Wafer size: 3 inch to 8 inch (12 inch version is available: RG-120 with Robot)
• Meas. range:
  (Resistivity)
  50u Ohm-cm to 40M Ohm-cm
  (Sheet resistance)
  0.5m Ohm/sq to 400M Ohm/sq
• Any number of cassette is available
• Communication software, SMF or FOUP compatible (Option)
• Mapping software: Up to 1221 points (Option)

Silicon Wafers

Thin Films
- Metal
- Diffused
- Ion-implanted
- Epitaxial
and so on